[{"data":1,"prerenderedAt":145},["ShallowReactive",2],{"cca696490feb4069c6cae136be691267":3,"ProductItem10557":7,"TopCategory":38,"ProductSelectProduct10557":141},{"code":4,"msg":5,"data":6},200,"success",{},{"code":4,"msg":5,"data":8},{"id":9,"parentId":10,"parentName":11,"name":12,"type":13,"sortNum":13,"createTime":14,"description":15,"homeUrl":16,"homeUrlAlt":16,"smallImage":17,"smallImageAlt":16,"price":18,"modelNumber":19,"meta":20,"configJson":21,"picList":22,"keywordsList":23,"newsList":24,"introduction":25,"configListList":26,"parentResp":27},10557,189,"FlashAnneal Furnace","VL Rapid Thermal Processing",1,"2025-09-23 13:54:10","The heating rate is fast, significantly shortening the process time.\n","https://source.venuslabtech.com/mall-prod/d85f2fab-5e0f-4686-b41d-7cdf885db2e1.png","https://source.venuslabtech.com/mall-prod/2b20d93d-c8b5-4d05-b9fa-082523e54859.png","$210.00","VLS-500-1000","[{\"name\":\"title\",\"label\":\"Title 标题\",\"content\":\"VL Rapid Thermal Processing | VenusLab\"},{\"name\":\"keywords\",\"label\":\"Keywords 关键词\",\"content\":\"Temperature-controlled microscopy stage,Cryogenic hot and cold stage,Variable temperature sample stage,Electrical/optical coupling hot and cold stage,Semiconductor device testing stage,In-situ thermal analysis stage,Controlled-environment microscopy stage,Thermal cycling stage for research,Phase transition observation stage,Programmable heating and cooling stage.\"},{\"name\":\"description\",\"label\":\"Description 描述\",\"content\":\"VL Rapid Thermal Processing is a rapid annealing furnace specially designed for high-temperature processing of semiconductors. It has a heating rate of up to 150℃/s and a temperature range of 500℃ to 1000℃. It supports various processes such as oxidation, diffusion, and CVD, and is compatible with 2-6 inch wafers, providing an efficient and stable heat treatment solution for semiconductor manufacturing. Explore it now!\"},{\"name\":\"og:title\",\"label\":\"og:title\",\"content\":\"VL Rapid Thermal Processing - Semiconductor Rapid Annealing Furnace\"},{\"name\":\"og:type\",\"label\":\"og:type\",\"content\":\"website\"},{\"name\":\"og:description\",\"label\":\"og描述\",\"content\":\"As a professional semiconductor rapid annealing furnace, VL Rapid Thermal Processing, with its efficient heating system, uniform temperature field design, and flexible process adaptability, has become an indispensable key equipment in the semiconductor manufacturing process, helping to improve production efficiency and product quality.\"},{\"name\":\"og:image\",\"label\":\"og图片\",\"content\":\"https://source.venuslabtech.com/mall-prod/d85f2fab-5e0f-4686-b41d-7cdf885db2e1.png\"},{\"name\":\"og:url\",\"label\":\"og url\",\"content\":\"https://www.venuslabtech.com/products/vl-rapid-thermal-processing-vls-500-1000\"},{\"name\":\"twitter:title\",\"label\":\"twitter:title\",\"content\":\"VL Rapid Thermal Processing - Semiconductor Rapid Annealing Furnace\"},{\"name\":\"twitter:description\",\"label\":\"twitter描述\",\"content\":\"As a professional semiconductor rapid annealing furnace, VL Rapid Thermal Processing, with its efficient heating system, uniform temperature field design, and flexible process adaptability, has become an indispensable key equipment in the semiconductor manufacturing process, helping to improve production efficiency and product quality.\"},{\"name\":\"twitter:image\",\"label\":\"twitter图片\",\"content\":\"https://source.venuslabtech.com/mall-prod/d85f2fab-5e0f-4686-b41d-7cdf885db2e1.png\"},{\"name\":\"twitter:card\",\"label\":\"twitter:card\",\"content\":\"summary_large_image\"},{\"name\":\"twitter:site\",\"label\":\"twitter:site\",\"content\":\"VenusLabtech\"}]","[{\"key1\":\"Cavity\",\"key2\":\"Temperature range\",\"value1\":\"Quartz cavity\",\"value2\":\"Heating on both upper and lower layers, with a maximum temperature of 1000℃\"},{\"key1\":\"Overall dimensions\",\"key2\":\"Net weight\",\"value1\":\"534mm×608mm×272mm\",\"value2\":\"42kg\"}]",[],[],[],"\u003Cp>\u003Cspan style=\"font-size: 19px; font-family: Arial;\">Advantages：\u003Cbr>Excellent temperature uniformity ensures consistent processing results across all areas of the wafer, improving product quality. Strong compatibility allows adaptation to wafers of different sizes to meet various production needs, while precise gas control can accurately regulate the process environment.\u003Cbr>\u003C/span>\u003C/p>\u003Cp>\u003Cbr>\u003C/p>\u003Cp>\u003Cspan style=\"font-size: 19px; font-family: Arial;\">Applications：\u003Cbr>Widely used in the field of advanced integrated circuit manufacturing. In addition to being extensively used in RTA processes, it can also be applied to rapid thermal oxidation, rapid thermal nitridation, rapid thermal diffusion, rapid chemical vapor deposition, as well as metal silicide formation, epitaxial processes, etc. It is also suitable for scenarios such as phosphosilicate glass annealing, integrated circuit manufacturing, metal alloying, polysilicon annealing, carbide annealing, silicide annealing, etc.\u003C/span>\u003C/p>",[],[28,32,35],{"id":29,"parentId":30,"name":31},6,0,"Opto-Mechanics",{"id":33,"parentId":29,"name":34},63,"Temperature Stage",{"id":36,"parentId":33,"name":37},68,"Special Applications",{"code":4,"msg":5,"data":39},[40,51,65,92,106,116,126],{"id":41,"parentId":30,"name":42,"sortNum":13,"smallImage":43,"smallImageAlt":43,"introduction":44,"children":45,"elect":30,"childrenFlag":13},2,"Light Sources","https://source.venuslabtech.com/mall-prod/0513a35b-c34f-4a0b-9a7d-d2e627c17713.png","\u003Cp>\u003Cspan style=\"font-size: 19px; font-family: Arial;\">At VenusLab, our Light Sources portfolio is designed to meet the diverse needs of modern research and industry. From multi-channel LED modules to high-stability laser engines, each solution delivers precision, stability, and adaptability for your specific applications. Whether for advanced imaging, optogenetics, or fiber-coupled systems, VenusLab light sources ensure consistent performance to drive your innovation forward.\u003C/span>\u003C/p>",[46],{"id":47,"parentId":41,"name":48,"sortNum":41,"smallImage":49,"smallImageAlt":49,"introduction":50,"elect":30,"childrenFlag":13},10,"Laser","https://source.venuslabtech.com/mall-prod/e90dbc77-1a1b-4c2f-b6ab-2b8aba78233c.png","\u003Cp>\u003Cbr>\u003C/p>",{"id":52,"parentId":30,"name":53,"sortNum":41,"smallImage":54,"smallImageAlt":54,"introduction":55,"children":56,"elect":30,"childrenFlag":13},3,"Detectors","https://source.venuslabtech.com/mall-prod/635fa0d9-5f9f-4575-8fbf-70d07d4a0fcf.png","\u003Cp>\u003Cspan style=\"font-size: 19px; font-family: Arial;\">The VenusLab detector product series is core-positioned around the concept of \"full-wavelength coverage, full-scenario adaptation, and high-precision output\". It builds a complete product matrix spanning from basic optical signal monitoring to single-photon-level ultra-high-precision detection through 6 major segmented categories. Covering the full wavelength range from ultraviolet (185nm) to short-wave infrared (2500nm), with response speeds ranging from 50ns down to 1ns and detection sensitivity spanning from 0.1nW to the single-photon level, this series can meet the differentiated optical signal detection needs across multiple fields such as scientific research, industry, biomedicine, and security. It provides stable and accurate core sensing components for various light-related applications.\u003C/span>\u003C/p>\u003Cp>\u003Cbr>\u003C/p>",[57,61],{"id":58,"parentId":52,"name":59,"sortNum":13,"smallImage":60,"smallImageAlt":60,"introduction":50,"elect":30,"childrenFlag":13},18,"Photodetector","https://source.venuslabtech.com/mall-prod/33fb14c5-d255-496c-b822-a0b81ee1a6ba.png",{"id":62,"parentId":52,"name":63,"sortNum":41,"smallImage":64,"smallImageAlt":64,"introduction":50,"elect":30,"childrenFlag":13},19,"Photodiodes","https://source.venuslabtech.com/mall-prod/15133790-2487-4ce3-bc77-372db6368e9b.png",{"id":66,"parentId":30,"name":67,"sortNum":52,"smallImage":68,"smallImageAlt":68,"introduction":69,"children":70,"elect":30,"childrenFlag":13},4,"Imaging","https://source.venuslabtech.com/mall-prod/02082dd8-575f-4441-8e63-81a43853d93c.png","\u003Cp style=\"line-height: 1.5;\">\u003Cspan style=\"font-size: 19px; font-family: Arial;\">Centered on the core concept of \"Precise Capture + Ecological Synergy\", the VenusLab imaging product series covers the entire imaging wavelength range from ultraviolet (200nm) to short-wave infrared (2500nm). It builds a complete product matrix that spans from microscopic imaging to weak light signal visualization through 4 major segmented product categories.\u003C/span>\u003C/p>\u003Cp style=\"line-height: 1.5;\">\u003Cspan style=\"font-size: 19px; font-family: Arial;\">The series can seamlessly interface with its detectors (such as single-photon counting modules and InGaAs detectors) and optical equipment, while boasting the combined characteristics of high resolution (up to 20 million pixels), high frame rate (up to 120fps), and low noise (dark current ≤ 1e-12 A). It meets the integrated needs of \"imaging - analysis - recording\" in fields including scientific research, industry, and biomedicine.\u003C/span>\u003C/p>",[71,75,79,83,88],{"id":72,"parentId":66,"name":73,"sortNum":13,"smallImage":74,"smallImageAlt":74,"introduction":50,"elect":30,"childrenFlag":13},24,"Scientific Cameras","https://source.venuslabtech.com/mall-prod/a53af2a6-2e06-4a58-936b-03479dda5ca0.png",{"id":76,"parentId":66,"name":77,"sortNum":41,"smallImage":78,"smallImageAlt":78,"introduction":50,"elect":30,"childrenFlag":13},25,"CMOS Cameras","https://source.venuslabtech.com/mall-prod/89dbbff2-301e-4dd6-a1a6-3196ea189a86.png",{"id":80,"parentId":66,"name":81,"sortNum":52,"smallImage":82,"smallImageAlt":82,"introduction":50,"elect":30,"childrenFlag":13},26,"CCD Cameras","https://source.venuslabtech.com/mall-prod/4362a829-8e2d-46a7-96c1-4c8ee45a6d15.png",{"id":84,"parentId":66,"name":85,"sortNum":86,"smallImage":87,"smallImageAlt":87,"introduction":50,"elect":30,"childrenFlag":13},32,"HDMI Cameras",9,"https://source.venuslabtech.com/mall-prod/4f44eb5c-8319-48da-b669-f3c4dbbcb13a.png",{"id":89,"parentId":66,"name":90,"sortNum":47,"smallImage":91,"smallImageAlt":91,"introduction":50,"elect":30,"childrenFlag":13},33,"Microscope Cameras","https://source.venuslabtech.com/mall-prod/d8690bc7-4af2-42a6-b02b-1cf084b52eb5.png",{"id":93,"parentId":30,"name":94,"sortNum":66,"smallImage":95,"smallImageAlt":95,"introduction":96,"children":97,"elect":30,"childrenFlag":13},5,"Optics & Fiber","https://source.venuslabtech.com/mall-prod/af136da6-6853-426d-8a86-5adc2985f50b.png","\u003Cp style=\"line-height: 1.5;\">\u003Cspan style=\"font-size: 19px; font-family: Arial;\">VenusLab's optical and fiber optic component products focus on high-precision optical signal regulation and transmission. They cover the entire chain from basic optical components to fiber optic integration solutions, and can form a synergistic effect with the company's own detectors, cameras and other products to build a complete optical system.\u003C/span>\u003C/p>",[98,102],{"id":99,"parentId":93,"name":100,"sortNum":13,"smallImage":101,"smallImageAlt":101,"introduction":50,"elect":30,"childrenFlag":13},34,"Imaging Optics","https://source.venuslabtech.com/mall-prod/ccadce05-879a-4005-bdf3-f0ea7c5c6ed7.png",{"id":103,"parentId":93,"name":104,"sortNum":52,"smallImage":105,"smallImageAlt":105,"introduction":50,"elect":30,"childrenFlag":13},36,"Fiber Parts","https://source.venuslabtech.com/mall-prod/1b80704b-5f12-40e1-b685-064d3055c56c.png",{"id":29,"parentId":30,"name":31,"sortNum":93,"smallImage":107,"smallImageAlt":107,"introduction":108,"children":109,"elect":30,"childrenFlag":13},"https://source.venuslabtech.com/mall-prod/3deebc29-027a-4603-b724-63f7e4fa6910.png","\u003Cp style=\"line-height: 1.5;\">\u003Cspan style=\"font-size: 19px; font-family: Arial;\">The VenusLab optomechanical products serve as the core carrier for supporting the stable operation of optical experiments and industrial optical systems, with \"Full-Dimensional Regulation + High-Stability Support + Extreme Environment Adaptability\" as their core value.They cover the full range of needs, spanning from \"microscopic position alignment\" to \"macroscopic system construction\", and from \"normal temperature & conventional scenarios\" to \"high-low temperature/vacuum extreme scenarios\".\u003C/span>\u003C/p>\u003Cp style=\"line-height: 1.5;\">\u003Cspan style=\"font-size: 19px; font-family: Arial;\">These products can achieve seamless synergy with the company’s in-house detectors, imaging equipment, light sources, and other products, forming an integrated optical solution for \"optical signal generation - transmission - regulation - detection\". They provide precision mechanical control capabilities ranging from the micrometer to nanometer scale for the scientific research and industrial fields.\u003C/span>\u003C/p>",[110,114],{"id":111,"parentId":29,"name":112,"sortNum":93,"smallImage":113,"smallImageAlt":113,"introduction":50,"elect":30,"childrenFlag":13},62,"Optical Tables","https://source.venuslabtech.com/mall-prod/1016b0a2-f58c-42c5-8e30-2c2f70e9c4c4.png",{"id":33,"parentId":29,"name":34,"sortNum":29,"smallImage":115,"smallImageAlt":115,"introduction":50,"elect":30,"childrenFlag":13},"https://source.venuslabtech.com/mall-prod/9710b50f-7653-4488-a541-811f4d9b889c.png",{"id":117,"parentId":30,"name":118,"sortNum":29,"smallImage":119,"smallImageAlt":119,"introduction":120,"children":121,"elect":30,"childrenFlag":13},7,"Optical Test & Metrology","https://source.venuslabtech.com/mall-prod/88a64fab-6c58-416d-8630-cea8401c3ecb.png","\u003Cp style=\"line-height: 1.5;\">\u003Cspan style=\"font-size: 19px; font-family: Arial;\">VenusLab's optical measurement and characterization products are centered on the core of \"Full Parameter Coverage, Extreme Environment Adaptability, and Intelligent Analysis\".They cover four major categories: spectral measurement, power and energy measurement, beam analysis, and infrared temperature measurement and imaging.Together with the company's in-house optomechanical products, these products form a closed-loop solution for \"Precision Regulation - Accurate Measurement\".\u003C/span>\u003C/p>",[122],{"id":123,"parentId":117,"name":124,"sortNum":13,"smallImage":125,"smallImageAlt":125,"introduction":50,"elect":30,"childrenFlag":13},69,"Spectral Measurement","https://source.venuslabtech.com/mall-prod/db8d8151-da44-436e-834a-28644b643784.png",{"id":127,"parentId":30,"name":128,"sortNum":117,"smallImage":129,"smallImageAlt":129,"introduction":130,"children":131,"elect":30,"childrenFlag":13},8,"Systems & Applications","https://source.venuslabtech.com/mall-prod/151843f8-ac03-4d88-a343-c0fbd70e75d1.png","\u003Cp style=\"line-height: 1.5;\">\u003Cspan style=\"font-size: 19px; font-family: Arial;\">Centered on \"Basic Observation - High-Resolution Analysis\", VenusLab offers brightfield/fluorescence microscopy for routine high-efficiency imaging, and confocal/Raman microscopy focusing on ultra-high resolution and molecular spectroscopy integration. Sharing modules and unified interfaces for flexible switching, they provide one-stop solutions for \"morphology observation - composition - structural analysis\" in biomedicine and materials science.\u003C/span>\u003C/p>",[132,137],{"id":133,"parentId":127,"name":134,"sortNum":41,"smallImage":135,"smallImageAlt":135,"introduction":136,"elect":30,"childrenFlag":13},85,"Confocal/Raman Microscopy","https://source.venuslabtech.com/mall-prod/dbf92573-535b-4fcb-b200-b90f31ae2d3b.png","\u003Cp style=\"line-height: 1.5;\">\u003Cspan style=\"color: rgba(0, 0, 0, 0.85); font-size: 19px; font-family: Arial;\">The Confocal/Raman Microscopy System is a product of in-depth integration of confocal microscopic imaging technology and Raman spectroscopy technology. It uses confocal technology to achieve high-resolution optical imaging and spatial localization of samples, and simultaneously acquires the molecular structure \"fingerprint information\" of designated microregions through Raman spectroscopy, ultimately realizing integrated detection of \"morphological observation - component identification - structural analysis\".\u003C/span>\u003C/p>",{"id":138,"parentId":127,"name":139,"sortNum":52,"smallImage":140,"smallImageAlt":140,"introduction":50,"childrenFlag":13},197,"Biological microscopy","https://source.venuslabtech.com/mall-prod/139800a9-89d5-4fa3-a2b7-4a3760edc22c.png",{"code":4,"msg":5,"data":142},{"productDTOS":143},[144],{"id":9,"name":12,"smallImage":17,"description":15,"price":18,"modelNumber":19,"introduction":25},1764059228111]